Parts For Sale TEGAL 42-852-001 TEGAL 42-852-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-852-001 Manufacturer TEGAL Part Number 42-852-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 39-853-005 47-339-005 52-050-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 40-295-003 FOCUS RING 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-041-001 47-105-001 42-908-002 58-046-001