Parts For Sale TEGAL 42-573-001 TEGAL 42-573-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-573-001 Manufacturer TEGAL Part Number 42-573-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-481-002 Insulator Ring 47-339-005 52-050-001 42-852-001 44-960-001 93-123-006 BELT 52-041-001 40-304-001 ELECTRODE, INSULATOR LOWER 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-445-001