Parts For Sale TEGAL 41-323-001 TEGAL 41-323-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-323-001 Manufacturer TEGAL Part Number 41-323-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 58-053-001 52-058-002 39-680-003 ELECTRODE, CONEHEAD VENTED 80-195-450 51-056-001 42-826-005 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 00-0917-2 5" GUIDE RING #G00-0917-2 51-178-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02