Parts For Sale TEGAL 41-320-001 TEGAL 41-320-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-320-001 Manufacturer TEGAL Part Number 41-320-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 40-768-004 Insulator Ring 46-437-002 40-395-002 Ring Ceramic 125C Castellated 46-994-002 46-1006-001 47-526-001 46-735-002 51-191-001 47-672-001 80-202-357 O-Ring