Parts For Sale TEGAL 41-316/317-001 TEGAL 41-316/317-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-316/317-001 Manufacturer TEGAL Part Number 41-316/317-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 46-879-001 40-768-006 Insulator Ring 44-888-001 42-683-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 42-960-003 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 44-957-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
