Parts For Sale TEGAL 41-266-001 TEGAL 41-266-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-266-001 Manufacturer TEGAL Part Number 41-266-001 Description Status Available Approx. Qty 31 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 31.0 US Other TEGAL Parts 58-073-001 40-481-002 Insulator Ring 40-467-001 42-362-001 47-101-002 39-894-001 52-047-002 40-790-001 FOCUS RING 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.