Parts For Sale TEGAL 41-166-012 TEGAL 41-166-012 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-166-012 Manufacturer TEGAL Part Number 41-166-012 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 51-251-001 51-092-001 74-124-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 42-326-002 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 42-960-003 40-576-003-C Ring Ceramic Focus Castellated 40-304-001 ELECTRODE, INSULATOR LOWER 46-556-002
