Parts For Sale TEGAL 41-162-002 TEGAL 41-162-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-162-002 Manufacturer TEGAL Part Number 41-162-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 47-155-001 41-209-001 41-351-001 40-140-001 RING, CERAMIC INSULATOR 49-027-001 47-080-003 41-405-001 39-735-004 Tegal 903e lower electrode 55-008-001 BELT SPAT 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02