Parts For Sale TEGAL 41-162-001 TEGAL 41-162-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-162-001 Manufacturer TEGAL Part Number 41-162-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 161-0040K VALVE, INLINE VACUUM 31-406-003 WAFER SENSOR ASSY-VCE 40-481-002 Insulator Ring 40-395-001 RING, FLAT 6 80-195-450 47-006-002 47-161-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 42-456-003 44-203-005 42-180-001/002