Parts For Sale TEGAL 41-148-002 TEGAL 41-148-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-148-002 Manufacturer TEGAL Part Number 41-148-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 47-158-002 38-023-001 COOLING RING 42-508-001 41-351-003 40-140-001 RING, CERAMIC INSULATOR 43-014-001 44-261-002 39-761-001 44-960-001 39-733-004 Tegal 903e lower electrode 55-008-001 BELT SPAT