Parts For Sale TEGAL 41-122-002 TEGAL 41-122-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-122-002 Manufacturer TEGAL Part Number 41-122-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 40-768-004 Insulator Ring 42-1007-001 46-776-003 83-259-001 44-888-001 42-323-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 41-354-003 46-272-003