Parts For Sale TEGAL 41-109-002 TEGAL 41-109-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-109-002 Manufacturer TEGAL Part Number 41-109-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 46-437-002 39-741-004 ELECTRODE, LOWER 6" 41-135-001 31-406-003 WAFER SENSOR ASSY-VCE 47-526-001 46-735-002 51-191-001 47-672-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.