Parts For Sale TEGAL 41-047-001 TEGAL 41-047-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-047-001 Manufacturer TEGAL Part Number 41-047-001 Description Status Available Approx. Qty 79 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 79.0 US Other TEGAL Parts 58-073-001 40-768-004 Insulator Ring 39-680-003 ELECTRODE, CONEHEAD VENTED 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 42-362-001 47-101-002 39-894-001 52-047-002 40-790-001 FOCUS RING 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.