Parts For Sale TEGAL 41-028-002 TEGAL 41-028-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-028-002 Manufacturer TEGAL Part Number 41-028-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 58-053-001 39-680-003 ELECTRODE, CONEHEAD VENTED 38-023-001 COOLING RING 80-195-450 51-056-001 42-826-005 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 00-0917-2 5" GUIDE RING #G00-0917-2 51-178-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-790-001 FOCUS RING