Parts For Sale TEGAL 41-028-002 TEGAL 41-028-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-028-002 Manufacturer TEGAL Part Number 41-028-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 40-481-002 Insulator Ring 50-079-001 40-395-001 RING, FLAT 6 46-810-001 40-140-001 RING, CERAMIC INSULATOR 46-866-001 46-1000-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 46-922-001 150 mm 150 mm 25 slot Aluminum wafer carrier.