Parts For Sale TEGAL 40-869-002 TEGAL 40-869-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-869-002 Manufacturer TEGAL Part Number 40-869-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-853-005 51-251-001 51-092-001 31-406-003 WAFER SENSOR ASSY-VCE 74-124-005 80-650-053 ACTUATOR 42-326-002 42-960-003 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 46-556-002 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 150 mm 150 mm 25 slot Aluminum wafer carrier.