Parts For Sale TEGAL 40-820-001 TEGAL 40-820-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-820-001 Manufacturer TEGAL Part Number 40-820-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 58-053-001 80-195-450 51-056-001 42-826-005 00-0917-2 5" GUIDE RING #G00-0917-2 40-295-003 FOCUS RING 51-178-001 80-202-357 O-Ring 150 mm 150 mm 25 slot Aluminum wafer carrier.
