Parts For Sale TEGAL 40-820-001 TEGAL 40-820-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-820-001 Manufacturer TEGAL Part Number 40-820-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 46-177-001 31-406-003 WAFER SENSOR ASSY-VCE 46-787-002 50-079-002 99-287-003 SHUTTLE INTERFACE BOARD 39-761-001 46-1000-001 44-705-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 83-288-001