Parts For Sale TEGAL 40-656-002 TEGAL 40-656-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-656-002 Manufacturer TEGAL Part Number 40-656-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-741-004 ELECTRODE, LOWER 6" 51-259-003 80-650-053 ACTUATOR 51-191-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 52-050-001 46-1000-001 52-167-001 58-046-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%