Parts For Sale TEGAL 40-579-001 TEGAL 40-579-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-579-001 Manufacturer TEGAL Part Number 40-579-001 Description Status Available Approx. Qty 65 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 65.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 99-247-003 SPATULA INTERFACE 46-776-003 44-888-001 42-323-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 93-123-006 BELT 41-354-003 46-272-003 44-439-001 150 mm 150 mm 25 slot Aluminum wafer carrier.