Parts For Sale TEGAL 40-559-003 TEGAL 40-559-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-559-003 Manufacturer TEGAL Part Number 40-559-003 Description RETAINER UPPER INSUL. Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other TEGAL Parts 32-356-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 32-139-002 29-345-021 KIT, CONS-STARTUP, HRE 1.1 37-411-001 41-395-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-295-003 FOCUS RING 32-260-001