Parts For Sale TEGAL 40-516-006 TEGAL 40-516-006 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-516-006 Manufacturer TEGAL Part Number 40-516-006 Description RING, MACOR 5" Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 29-345-021 KIT, CONS-STARTUP, HRE 1.1 40-768-004 Insulator Ring 52-058-002 38-023-001 COOLING RING 37-180-001 23-193-003 39-741-026 Tegal 903e lower electrode 99-287-003 SHUTTLE INTERFACE BOARD 32-301-001 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 39-735-008 ELECTRODE, LOWER ANODIZED 6" 39-735-004 Tegal 903e lower electrode