Parts For Sale TEGAL 40-402-001 TEGAL 40-402-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-402-001 Manufacturer TEGAL Part Number 40-402-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 46-180-001 51-191-001 46-786-001 46-787-002 80-095-278 DAC SCAN BOARD 40-482-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-790-001 FOCUS RING 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 83-288-001