Parts For Sale TEGAL 40-366-008 TEGAL 40-366-008 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-366-008 Manufacturer TEGAL Part Number 40-366-008 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 58-053-001 80-195-450 51-056-001 42-826-005 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 00-0917-2 5" GUIDE RING #G00-0917-2 51-178-001 37-222-002 Cooling Plate 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 150 mm 150 mm 25 slot Aluminum wafer carrier.