Parts For Sale TEGAL 40-366-006 TEGAL 40-366-006 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-366-006 Manufacturer TEGAL Part Number 40-366-006 Description Status Available Approx. Qty 28 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 28.0 US Other TEGAL Parts 58-073-001 52-058-002 38-023-001 COOLING RING 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 42-362-001 47-101-002 39-894-001 52-047-002 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%