Parts For Sale TEGAL 40-366-003 TEGAL 40-366-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-366-003 Manufacturer TEGAL Part Number 40-366-003 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-251-001 51-092-001 46-1006-001 56-006-001 93-229-005 RF CABLE 901E 46-787-003 51-259-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 39-741-009 Tegal 903e lower electrode 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 52-175-001