Parts For Sale TEGAL 40-366-003 TEGAL 40-366-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-366-003 Manufacturer TEGAL Part Number 40-366-003 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-395-002 Ring Ceramic 125C Castellated 40-768-006 Insulator Ring 51-259-003 93-229-005 RF CABLE 901E 51-191-001 52-050-001 46-1000-001 52-167-001 40-576-003-C Ring Ceramic Focus Castellated 58-046-001