Parts For Sale TEGAL 40-277-001 TEGAL 40-277-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-277-001 Manufacturer TEGAL Part Number 40-277-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-053-001 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 51-056-001 42-826-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 99-287-003 SHUTTLE INTERFACE BOARD 00-0917-2 5" GUIDE RING #G00-0917-2 51-178-001 40-304-001 ELECTRODE, INSULATOR LOWER