Parts For Sale TEGAL 40-177-001 TEGAL 40-177-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-177-001 Manufacturer TEGAL Part Number 40-177-001 Description Status Available Approx. Qty 75 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 75.0 US Other TEGAL Parts 42-1007-001 39-680-003 ELECTRODE, CONEHEAD VENTED 46-776-003 38-023-001 COOLING RING 44-888-001 42-323-001 41-354-003 46-272-003 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 37-222-002 Cooling Plate 150 mm 150 mm 25 slot Aluminum wafer carrier.