Parts For Sale TEGAL 40-1053-001 TEGAL 40-1053-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-1053-001 Manufacturer TEGAL Part Number 40-1053-001 Description RF Sleeve Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 37-180-001 23-193-003 44-888-001 39-956-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 39-733-004 Tegal 903e lower electrode 32-301-001 44-957-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-735-004 Tegal 903e lower electrode 150 mm 150 mm 25 slot Aluminum wafer carrier.