Parts For Sale TEGAL 39-872-001 TEGAL 39-872-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-872-001 Manufacturer TEGAL Part Number 39-872-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 52-058-002 51-259-003 80-650-053 ACTUATOR 93-229-005 RF CABLE 901E 51-191-001 52-050-001 46-1000-001 52-167-001 40-790-001 FOCUS RING 58-046-001 150 mm 150 mm 25 slot Aluminum wafer carrier.