Parts For Sale TEGAL 39-872-001 TEGAL 39-872-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-872-001 Manufacturer TEGAL Part Number 39-872-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 51-251-001 51-092-001 56-006-001 46-787-003 51-259-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-761-001 93-123-006 BELT 52-175-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 150 mm 150 mm 25 slot Aluminum wafer carrier.