Parts For Sale TEGAL 39-864-001 TEGAL 39-864-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-864-001 Manufacturer TEGAL Part Number 39-864-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 51-191-001 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 46-1000-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-167-001 40-790-001 FOCUS RING 80-871-146 CABLE MTCH NTWK INSTALLATION POSSIBLE ON: TEGAL 903 OPM: ... 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 58-046-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E