Parts For Sale TEGAL 39-853-001 TEGAL 39-853-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-853-001 Manufacturer TEGAL Part Number 39-853-001 Description 5" SPATULA Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 39-735-008 ELECTRODE, LOWER ANODIZED 6" 37-222-002 Cooling Plate 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 29-345-021 KIT, CONS-STARTUP, HRE 1.1 37-221-002 UPPER ELECT ANOD, NON ANODIZED 37-180-001 23-193-003 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 39-741-026 Tegal 903e lower electrode 32-301-001 80-202-357 O-Ring