Parts For Sale TEGAL 39-853-001 TEGAL 39-853-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-853-001 Manufacturer TEGAL Part Number 39-853-001 Description 5" SPATULA Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 47-158-002 39-861-002 93-229-005 RF CABLE 901E 39-756-003 41-351-003 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 39-741-026 Tegal 903e lower electrode 46-925-001 37-524-001 40-790-001 FOCUS RING 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.