Parts For Sale TEGAL 39-853-001 TEGAL 39-853-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-853-001 Manufacturer TEGAL Part Number 39-853-001 Description 5" SPATULA Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 40-768-004 Insulator Ring 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-741-004 ELECTRODE, LOWER 6" 40-467-001 42-362-001 47-101-002 39-894-001 39-741-009 Tegal 903e lower electrode 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 52-047-002