Parts For Sale TEGAL 39-852-005 TEGAL 39-852-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-852-005 Manufacturer TEGAL Part Number 39-852-005 Description Status Available Approx. Qty 17 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 17.0 US Other TEGAL Parts 40-768-004 Insulator Ring 46-879-001 39-741-004 ELECTRODE, LOWER 6" 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 39-756-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 44-888-001 42-683-001 39-956-001 42-960-003 44-957-001