Parts For Sale TEGAL 39-847-004 TEGAL 39-847-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-847-004 Manufacturer TEGAL Part Number 39-847-004 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-768-006 Insulator Ring 51-259-003 51-191-001 83-259-001 52-050-001 99-287-003 SHUTTLE INTERFACE BOARD 46-1000-001 52-167-001 58-046-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%