Parts For Sale TEGAL 39-668-002 TEGAL 39-668-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-668-002 Manufacturer TEGAL Part Number 39-668-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-251-001 51-092-001 38-023-001 COOLING RING 56-006-001 83-259-001 46-787-003 51-259-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 52-175-001