Parts For Sale TEGAL 39-663-001 TEGAL 39-663-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-663-001 Manufacturer TEGAL Part Number 39-663-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 38-023-001 COOLING RING 42-426-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 47-339-005 52-050-001 42-852-001 40-295-003 FOCUS RING 52-041-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 39-750-001 39-735-004 Tegal 903e lower electrode