Parts For Sale TEGAL 39-630-001 TEGAL 39-630-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-630-001 Manufacturer TEGAL Part Number 39-630-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 46-177-001 40-481-002 Insulator Ring 40-374-006 46-787-002 50-079-002 39-741-026 Tegal 903e lower electrode 46-1000-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.