Parts For Sale TEGAL 39-164-001 TEGAL 39-164-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-164-001 Manufacturer TEGAL Part Number 39-164-001 Description Status Available Approx. Qty 15 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 15.0 US Other TEGAL Parts 46-879-001 93-229-005 RF CABLE 901E 40-395-001 RING, FLAT 6 44-888-001 42-683-001 39-956-001 42-960-003 39-741-009 Tegal 903e lower electrode 44-957-001
