Parts For Sale TEGAL 39-142-002 TEGAL 39-142-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-142-002 Manufacturer TEGAL Part Number 39-142-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 46-177-001 93-229-005 RF CABLE 901E 40-374-006 46-787-002 50-079-002 46-1000-001 40-304-001 ELECTRODE, INSULATOR LOWER 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.