Parts For Sale TEGAL 37-965-001 TEGAL 37-965-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-965-001 Manufacturer TEGAL Part Number 37-965-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 51-251-001 99-247-003 SPATULA INTERFACE 51-092-001 31-406-003 WAFER SENSOR ASSY-VCE 74-124-005 42-326-002 42-960-003 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 37-222-002 Cooling Plate 46-556-002 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 80-200-121 BEARING DOOR T915 TEGAL CORPORATION