Parts For Sale TEGAL 37-878-001 TEGAL 37-878-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-878-001 Manufacturer TEGAL Part Number 37-878-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 38-023-001 COOLING RING 40-395-001 RING, FLAT 6 46-810-001 74-101-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 37-222-002 Cooling Plate
