Parts For Sale TEGAL 37-878-001 TEGAL 37-878-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-878-001 Manufacturer TEGAL Part Number 37-878-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 52-058-002 51-259-003 52-050-001 39-761-001 46-1000-001 52-167-001 39-797-001 58-046-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02