Parts For Sale TEGAL 37-871-001 TEGAL 37-871-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-871-001 Manufacturer TEGAL Part Number 37-871-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 41-113-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 80-195-450 47-006-002 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 42-456-003 42-180-001/002 40-304-001 ELECTRODE, INSULATOR LOWER 39-533-001