Parts For Sale TEGAL 37-871-001 TEGAL 37-871-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-871-001 Manufacturer TEGAL Part Number 37-871-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-861-002 31-406-003 WAFER SENSOR ASSY-VCE 42-508-001 41-351-003 43-014-001 44-261-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-605-001 39-735-004 Tegal 903e lower electrode 80-200-121 BEARING DOOR T915 TEGAL CORPORATION