Parts For Sale TEGAL 37-867-001 TEGAL 37-867-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-867-001 Manufacturer TEGAL Part Number 37-867-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 46-810-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-832-001 93-123-006 BELT 39-733-004 Tegal 903e lower electrode 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 46-922-001