Parts For Sale TEGAL 37-816-001 TEGAL 37-816-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-816-001 Manufacturer TEGAL Part Number 37-816-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 51-251-001 51-092-001 74-124-005 80-650-053 ACTUATOR 42-326-002 99-287-003 SHUTTLE INTERFACE BOARD 42-960-003 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 46-556-002