Parts For Sale TEGAL 37-668-001 TEGAL 37-668-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-668-001 Manufacturer TEGAL Part Number 37-668-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 46-879-001 31-406-003 WAFER SENSOR ASSY-VCE 44-757-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-583-001 47-695-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 41-362-002 40-790-001 FOCUS RING 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 50-056-001