Parts For Sale TEGAL 37-648-001-2 TEGAL 37-648-001-2 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-648-001-2 Manufacturer TEGAL Part Number 37-648-001-2 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 80-650-053 ACTUATOR 46-810-001 40-467-001 39-894-001 39-832-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 46-922-001 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL