Parts For Sale TEGAL 37-588-001 TEGAL 37-588-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-588-001 Manufacturer TEGAL Part Number 37-588-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 46-1006-001 52-050-001 46-1000-001 52-167-001 99-249-002 PCB TEGAL END POINT DETECTOR 80-202-357 O-Ring 39-797-001 58-046-001 39-735-004 Tegal 903e lower electrode