Parts For Sale TEGAL 37-587-001 TEGAL 37-587-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-587-001 Manufacturer TEGAL Part Number 37-587-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-768-006 Insulator Ring 40-481-002 Insulator Ring 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 42-362-001 47-101-002 39-894-001 40-295-003 FOCUS RING 41-387-001 52-047-002