Parts For Sale TEGAL 37-587-001 TEGAL 37-587-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-587-001 Manufacturer TEGAL Part Number 37-587-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-853-005 33-349-004 ELECTRODE, CONDEHEAD UPPER 44-432-002 39-756-003 37-411-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 41-395-001 51-228-001 46-1010-002 39-741-009 Tegal 903e lower electrode 46-1014-002