Parts For Sale TEGAL 37-547-001 TEGAL 37-547-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-547-001 Manufacturer TEGAL Part Number 37-547-001 Description Status Available Approx. Qty 14 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 14.0 US Other TEGAL Parts 58-073-001 39-680-003 ELECTRODE, CONEHEAD VENTED 40-467-001 42-362-001 47-101-002 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-047-002 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
