Parts For Sale TEGAL 37-528-001 TEGAL 37-528-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-528-001 Manufacturer TEGAL Part Number 37-528-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 47-639-001 39-741-004 ELECTRODE, LOWER 6" 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-003 41-271-002 31-406-003 WAFER SENSOR ASSY-VCE 47-155-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 46-787-002 39-563-001