Parts For Sale TEGAL 37-528-001 TEGAL 37-528-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-528-001 Manufacturer TEGAL Part Number 37-528-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-768-004 Insulator Ring 46-879-001 39-741-004 ELECTRODE, LOWER 6" 44-757-001 40-395-001 RING, FLAT 6 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-583-001 47-695-001 41-362-002 50-056-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE