Parts For Sale TEGAL 37-525-002 TEGAL 37-525-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-525-002 Manufacturer TEGAL Part Number 37-525-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 51-251-001 51-092-001 31-406-003 WAFER SENSOR ASSY-VCE 80-650-053 ACTUATOR 56-006-001 46-787-003 40-140-001 RING, CERAMIC INSULATOR 51-259-001 99-287-003 SHUTTLE INTERFACE BOARD 52-175-001