Parts For Sale TEGAL 37-509-001A TEGAL 37-509-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-509-001A Manufacturer TEGAL Part Number 37-509-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 46-1000-001 52-167-001 39-797-001 58-046-001 39-735-004 Tegal 903e lower electrode 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02