Parts For Sale TEGAL 37-509-001A TEGAL 37-509-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-509-001A Manufacturer TEGAL Part Number 37-509-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 39-636-001 80-195-450 51-056-001 42-826-005 39-380-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 51-178-001